項次 | 料號 | 數量 | 單位 | 需用日 | 小計 |
| 品名規格 | | | 單價 | |
規格 | |
10 |
|
1 |
EA |
20251031 |
|
| 真空鍍膜零組件及基板材料 | | |
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| 真空鍍膜零組件及基板材料 1.真空計控制與感測頭模組 Vacuum Gauge sensor head and controller Connecting Size:NW25 Measurement Range:1.3x10+3 to 1.0*10-3 mbar Analog output(Option):Linear 0 to 6 vdc, 1vdc/decade Set points:2 independently relays sppi contacts 2A@120VAC Power requirement:約90-260Vac/10W, 50/60Hz Pressure Range:1.3x10+3 to 1.0*10-3 mbar Gauge Cable:約3 Meters
2.實驗用晶圓材料 Si Wafer12” ψ x 600+/- 100 μ m , PType, 100 Res.:1~10ohm-cm, 雙面拋光,50pcs 表層Al2O3鍍膜約35~45nm
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